Holding table
The invention provides a holding table, wherein the generation of static electricity caused by friction is avoided when workpieces are machined or processed and charges are not easily accumulated in the workpieces so as to reduce the charge amount and suppress the damage caused by static electricity...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | The invention provides a holding table, wherein the generation of static electricity caused by friction is avoided when workpieces are machined or processed and charges are not easily accumulated in the workpieces so as to reduce the charge amount and suppress the damage caused by static electricity. The holding table comprises a workpiece supporting part (40) equipped with an adsorption part (42) formed by porous bodies and the adsorption part (42) of a frame (41) formed by an insulation body for transmitting negative pressure to the supporting surface (421) of a supporting workpiece (1); a rotation supporting part (50) for supporting the rotation of the workpiece supporting part; a lightweight space (43) formed between the rotation supporting part and the workpiece supporting part; and a suction pathway (70A) for communicating the absorption part with a negative pressure source for generating negative pressure. The suction pathway is not communicated with the lightweight space. |
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