Pressure sensor and method

Bibliographische Detailangaben

Hauptverfasser:	MEINHOLD DIRK, ELIAN KLAUS, MUELLER MARCO, ROSAM BEN, KOLB STEFAN, KAUTZSCH THORALF
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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