Vacuum evacuation system, substrate processing apparatus, method for manufacturing electronic device, and method for operating vacuum evacuation system

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Bibliographische Detailangaben
Hauptverfasser:	KOMAI HISAYOSHI, OKADA TAKAHIRO, AOKI KAZUTOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING COMBINED HEATING AND REFRIGERATION SYSTEMS HEAT PUMP SYSTEMS HEATING LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS REFRIGERATION MACHINES, PLANTS OR SYSTEMS REFRIGERATION OR COOLING WEAPONS
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