Method for concave and convex pattern formation and apparatus for manufacturing concave and convex pattern

Disclosed is a method for concave and convex pattern formation that is a nano-imprint process useful for the manufacture of electronic devices, optical components, recording media and the like, by which and can manufacture such products having a fine pattern can be manufactured at a low cost and hig...

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Bibliographische Detailangaben
Hauptverfasser:	KAIDA EIZOU, INAMIYA TAKATO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULARARTICLES INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	Disclosed is a method for concave and convex pattern formation that is a nano-imprint process useful for the manufacture of electronic devices, optical components, recording media and the like, by which and can manufacture such products having a fine pattern can be manufactured at a low cost and high-speed. The method is characterized by comprising a step of mounting the surface of a stamper having a fine concave and convex pattern onto a photo-curable transfer and then pressing the stamper to form a laminate; a step of curing the transfer layer in the laminate with the stamper by ultraviolet irradiation and then removing the stamper to obtain an intermediate stamper having a fine reverse concave and convex pattern on the surface of the transfer layer; a step of mounting the intermediate stamper onto a photo-curable transfer and then pressing the intermediate stamper to form a laminate; and a step of curing the transfer layer in the laminate including the intermediate stamper by ultraviolet irradiation and th