Flat line type ion trap mass analyzer based on MEMS (micro electro mechanical system) process and manufacturing method thereof

Flat line type ion trap mass analyzer based on MEMS (micro electro mechanical system) process and manufacturing method thereof

The invention discloses a flat line type ion trap mass analyzer based on an MEMS (micro electro mechanical system) process and a manufacturing method thereof. The flat line type ion trap mass analyzer based on the MEMS (micro electro mechanical system) process comprises a substrate, a support beam,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YIN SHIPING, LIU YOUJIANG, CHENG YUPENG, KONG DEYI, LIU YING, QIAN YUJIE, ZHAO GUI, CHEN RAN, SUN WENJUAN, ZHAO CONG, CHEN CHILAI, LI ZHUANG, WANG DIANLING, DUAN XIUHUA
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TESTING
TRANSPORTING
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Beschreibung
Zusammenfassung:The invention discloses a flat line type ion trap mass analyzer based on an MEMS (micro electro mechanical system) process and a manufacturing method thereof. The flat line type ion trap mass analyzer based on the MEMS (micro electro mechanical system) process comprises a substrate, a support beam, an ion focusing electrode, a front gate electrode, a main radio frequency electrode, an auxiliary radio frequency electrode, a rear gate electrode, an ion exit repulsion electrode and an ion exit, wherein the integrated ion focusing electrode reduces ion loss, and the ion capture rate is improved; compared with an external ion focusing lens, an error caused by assembling accuracy is reduced; and the manufacturing method adopts the MEMS process, and the processing accuracy and the yield are improved, thus batch production is easy to realize.