Method for producing a solar cell having a two-stage doping

Method for producing a solar cell having a two-stage doping

Method for producing solar cells with a two-stage doping (9, 11) comprises the steps of heavy doping (50) of at least a part of the solar cell substrate (1), of at least temporarily protecting doped areas (8), in which heavily doped areas (9) of the two-stage doping (9, 11) should be formed, from an...

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Bibliographische Detailangaben
Hauptverfasser: HOLBIG EVA-MARIA, MELNYK IHOR, KELLER STEFFEN, KRUEMBERG JENS, SCHLOSSER REINHOLD, SCHMIDT MICHAEL, FATH PETER
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:Method for producing solar cells with a two-stage doping (9, 11) comprises the steps of heavy doping (50) of at least a part of the solar cell substrate (1), of at least temporarily protecting doped areas (8), in which heavily doped areas (9) of the two-stage doping (9, 11) should be formed, from an etching medium and etching back (54; 62, 64; 72, 74) unprotected doped areas (17) of the solar cell substrate (1) by means of the etching medium, whereby, for the purpose of protecting the doped areas, sacrificial structures (7) are applied (52) on the areas (8) to be protected, which are at least partly etched (54; 62, 64; 72, 74) during etching back (54; 62, 64; 72, 74) of the unprotected doped areas.