Modular electrical tuning micro flow control array optical switch chip

The invention provides a modular electrical tuning micro flow control array optical switch chip, which uses a structure of ''a cover plate + a waveguide layer + a substrate'', wherein a first layer is the cover plate (1); a wiring hole (2) is arranged on the cover plate; a second layer is the waveguide layer (3), wherein a micro runner (4), four bar-shaped wave guides and two isosceles right-angle prisms are arranged in the waveguide layer; the inclined surfaces of the two prisms form the micro runner, one end of the micro runner is sealed, the other end is a curved surface structure (11) which is extended outwards; a film (12) is pasted to the outer side of the curved surface, and an electrical tuning controller (13) is arranged on the outer side of the film; a third layer is the substrate (14); the lower surface of the cover plate and the waveguide layer, and the waveguide layer and the substrate are connected in a plasma auxiliary bonding way, for realizing the sealing and fixing effects. The invention bel