Vacuum processing chamber formed by the casting of aluminum

The invention provides a vacuum processing chamber formed by the casting of aluminum and the volume of the is processing chamber defined by a wall.The wall formed by the casting of aluminum comprises an outer surface and an inner surface.The inner surface of the wall defines the volume of the chambe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: EHRENSPERGER DAMIAN, ILINICH EDUARD, DE BIASIO EUGENIO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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