Vacuum processing chamber formed by the casting of aluminum

The invention provides a vacuum processing chamber formed by the casting of aluminum and the volume of the is processing chamber defined by a wall.The wall formed by the casting of aluminum comprises an outer surface and an inner surface.The inner surface of the wall defines the volume of the chambe...

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Bibliographische Detailangaben
Hauptverfasser:	EHRENSPERGER DAMIAN, ILINICH EDUARD, DE BIASIO EUGENIO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS ANDNON-FERROUS ALLOYS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TREATMENT OF ALLOYS OR NON-FERROUS METALS
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Beschreibung
Zusammenfassung:	The invention provides a vacuum processing chamber formed by the casting of aluminum and the volume of the is processing chamber defined by a wall.The wall formed by the casting of aluminum comprises an outer surface and an inner surface.The inner surface of the wall defines the volume of the chamber.A method of manufacturing the vacuum processing chamber is also provided in the invention.The inner surface of the wall smoothed by grinding and polishing is then subject to the treatment of shot blasting or bead blasting.By adopting the above method, the vacuum processing chamber is manufactured to improve the inner surface of the wall of the chamber.