Lithographic apparatus having parts with a coated film adhered thereto
The invention discloses a lithographic apparatus having parts with a coated film adhered thereto. The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement stru...
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| creator | LOOPSTRA ERIK ROELOF STEFFENS KOEN DIRECKS DANIEL JOZEF MARIA SIMONS WILHELMUS FRANCISCUS JO FIEN MENNO VAN DER HAM RONALD BRANDS GERT-JAN GERARDUS JOHAN LIEBREGTS PAULUS MARTINUS MARI JANSSEN FRANCISCUS JOHANNES JO |
| description | The invention discloses a lithographic apparatus having parts with a coated film adhered thereto. The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure. |
| format | Patent |
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The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.</description><language>chi ; eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110525&DB=EPODOC&CC=CN&NR=102073223A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110525&DB=EPODOC&CC=CN&NR=102073223A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LOOPSTRA ERIK ROELOF</creatorcontrib><creatorcontrib>STEFFENS KOEN</creatorcontrib><creatorcontrib>DIRECKS DANIEL JOZEF MARIA</creatorcontrib><creatorcontrib>SIMONS WILHELMUS FRANCISCUS JO</creatorcontrib><creatorcontrib>FIEN MENNO</creatorcontrib><creatorcontrib>VAN DER HAM RONALD</creatorcontrib><creatorcontrib>BRANDS GERT-JAN GERARDUS JOHAN</creatorcontrib><creatorcontrib>LIEBREGTS PAULUS MARTINUS MARI</creatorcontrib><creatorcontrib>JANSSEN FRANCISCUS JOHANNES JO</creatorcontrib><title>Lithographic apparatus having parts with a coated film adhered thereto</title><description>The invention discloses a lithographic apparatus having parts with a coated film adhered thereto. The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. 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The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | Lithographic apparatus having parts with a coated film adhered thereto |
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