Lithographic apparatus having parts with a coated film adhered thereto

The invention discloses a lithographic apparatus having parts with a coated film adhered thereto. The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement stru...

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Bibliographische Detailangaben
Hauptverfasser:	LOOPSTRA ERIK ROELOF, STEFFENS KOEN, DIRECKS DANIEL JOZEF MARIA, SIMONS WILHELMUS FRANCISCUS JO, FIEN MENNO, VAN DER HAM RONALD, BRANDS GERT-JAN GERARDUS JOHAN, LIEBREGTS PAULUS MARTINUS MARI, JANSSEN FRANCISCUS JOHANNES JO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The invention discloses a lithographic apparatus having parts with a coated film adhered thereto. The lithographic apparatus is disclosed having a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.