Enhancement of detection of defects on display panels using front lighting

Front-side illumination apparatus and methods are provided to enable, in general, detection of a-Si residue defects at the array test step well before the cell step. A-Si has high resistivity without exposure to light making it difficult to detect in conventional TFT-array test procedures. On the ot...

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Bibliographische Detailangaben
Hauptverfasser: TOET DANIEL, MYUNGCHUL JUN, PHAM SAVIER, ERSAHIN ATILA, JONES LLOYD, JUNG SAM SOO
Format: Patent
Sprache:chi ; eng
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