Method for detecting testing structure of semiconductor device

The invention discloses a method for detecting a testing structure of a semiconductor device, and the method is suitable for the semiconductor devices with a locating slot with orientation (100); the method comprises: a testing structure is grown on the semiconductor device with the locating slot with orientation (100), the grown testing structure and the wiring direction of the semiconductor device form an included angle of 45 degrees; the semiconductor device is split mechanically to obtain splitting surfaces; the splitting surface is detected by adopting SEM, so as to obtain detecting data. The method provided by the invention can accurately detect the testing structure of the semiconductor device with the locating slot with orientation (100).