Lithographic apparatus and method

A drive system for controllably driving an electric actuator includes a current sensor system (143) to sense a current (I) conducted by the actuator (M1) and a driver (141) to electrically drive the actuator based on an output signal of the current sensor system. The current sensor system includes a...

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Bibliographische Detailangaben
Hauptverfasser:	BUTLER HANS, VAN GILS PETRUS JACOBUS MARIA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORSOR DYNAMO-ELECTRIC CONVERTERS CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A drive system for controllably driving an electric actuator includes a current sensor system (143) to sense a current (I) conducted by the actuator (M1) and a driver (141) to electrically drive the actuator based on an output signal of the current sensor system. The current sensor system includes at least a first (144, 146) and a second current sensor (145, 147) that have a mutually different sensitivity for the current to be sensed and the drive syste includes a current sensor controller (148) to control an extent to which each o the current sensors to determine the output signal of the current sensor system.