Method for improving reliability of photosensitive materials of flat-panel display

The invention discloses a method for improving the reliability of photosensitive materials of a flat-panel display. A yellow light photoetching process is adopted for manufacturing photosensitive material film layers on a base plate, and the method comprises the following steps: glue coating, exposu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIN RONGFENG, ZHAN GUOHUA, TENG SHUJUN, WANG JINKE, HAN RONGMIN, WANG ZAIZHONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a method for improving the reliability of photosensitive materials of a flat-panel display. A yellow light photoetching process is adopted for manufacturing photosensitive material film layers on a base plate, and the method comprises the following steps: glue coating, exposure, development and curing. The invention is characterized in that in the glue coating step, the formed photosensitive material film layer has the thickness between 0.5 and 20 mum, and the exposure amount in the exposure step is at least 250 mj/cm . The method of the invention can greatly improve the attaching performance of the photosensitive materials on the base plate, and can enhance the film layer structure of the photosensitive materials, so the photosensitive materials can bear the corrosion of chemical medicine such as high-concentration strong acid, strong base and the like, the high-temperature and high-humidity boiling water steaming and boiling for a long time, and the environment impact of sharp quench