Method for coating surface of radiation module and coated radiation module
The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane...
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| creator | LIN YUXUE |
| description | The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane gas into the working environment, applying an external power to generate a bias electric field in the working environment, so an adhered film is formed on the surface of the radiation module; forming a complex film on the surface of the adhered film; and forming a carbon film with a non-crystal structure on the surface of the complex film, thereby, a coated radiation module is manufactured. In the complex film, the position is farther away from the radiation module, the content of the carbon material with the non-crystal structure is higher. |
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The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane gas into the working environment, applying an external power to generate a bias electric field in the working environment, so an adhered film is formed on the surface of the radiation module; forming a complex film on the surface of the adhered film; and forming a carbon film with a non-crystal structure on the surface of the complex film, thereby, a coated radiation module is manufactured. 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The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane gas into the working environment, applying an external power to generate a bias electric field in the working environment, so an adhered film is formed on the surface of the radiation module; forming a complex film on the surface of the adhered film; and forming a carbon film with a non-crystal structure on the surface of the complex film, thereby, a coated radiation module is manufactured. In the complex film, the position is farther away from the radiation module, the content of the carbon material with the non-crystal structure is higher.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY PRINTED CIRCUITS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Method for coating surface of radiation module and coated radiation module |
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