Method for coating surface of radiation module and coated radiation module
The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane gas into the working environment, applying an external power to generate a bias electric field in the working environment, so an adhered film is formed on the surface of the radiation module; forming a complex film on the surface of the adhered film; and forming a carbon film with a non-crystal structure on the surface of the complex film, thereby, a coated radiation module is manufactured. In the complex film, the position is farther away from the radiation module, the content of the carbon material with the non-crystal structure is higher. |
---|