Method for coating surface of radiation module and coated radiation module

The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane...

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1. Verfasser: LIN YUXUE
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a method for coating a surface of a radiation module. The method comprises the following steps of: providing a radiation module; cleaning the surface of the radiation module; putting the radiation module in a working environment, introducing hydrogen gas and tetramethylsilane gas into the working environment, applying an external power to generate a bias electric field in the working environment, so an adhered film is formed on the surface of the radiation module; forming a complex film on the surface of the adhered film; and forming a carbon film with a non-crystal structure on the surface of the complex film, thereby, a coated radiation module is manufactured. In the complex film, the position is farther away from the radiation module, the content of the carbon material with the non-crystal structure is higher.