Double-flash evaporation device for preparing superlattice thermoelectric film material

The invention discloses a double-flash evaporation device for preparing a super lattice thermoelectric film material. The double-flash evaporation device structurally comprises a substrate means consisting of a speed regulating motor, a substrate bracket, a heater, a substrate, a quartz crystal osci...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DUAN XINGKAI, HU KONGGANG, JIANG YUEZHEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a double-flash evaporation device for preparing a super lattice thermoelectric film material. The double-flash evaporation device structurally comprises a substrate means consisting of a speed regulating motor, a substrate bracket, a heater, a substrate, a quartz crystal oscillation thickness monitoring instrument, a baffle plate and a thermocouple. The speed regulating motor is connected with the substrate bracket. The substrate is installed below the substrate bracket. The substrate bracket is positioned in a vacuum cavity body. The speed regulating motor drives the substrate bracket and the substrate to rotate. The heater is used for heating the substrate, and the thermocouple is used for measuring the temperature of the substrate. Each of two powder feeders consists of a powder container, a quartz tube and a time relay. The powder feeders are fixed onto the inner wall of the vacuum cavity body. The vacuum cavity body is provided with a water inlet and a water outlet. A vacuum syste