Film bulk acoustic resonator structure with single-layer electrodes and manufacturing method thereof

The invention discloses a film bulk acoustic resonator structure with single-layer electrodes and a manufacturing method thereof, and belongs to the field of resonator devices. A substrate is provided with a piezoelectric film; an acoustic wave reflecting layer has a Bragg reflection structure or an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHAO SHIHENG, YANG YI, PENG PINGGANG, ZHOU CHANGJIAN, DONG SHURONG, REN TIANLING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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