Method and device for alignment and assembly of glass micro nanofluidic chip

The invention discloses a method and a device for the alignment and assembly of a glass micro nanofluidic chip and belongs to the field of microelement assembly. In the method for the alignment and assembly of the glass micro nanofluidic chip, a microscope is adopted to observe the alignment condition of the glass micro nanofluidic chip, and a method of a fixed substrate and a movable cover plateis adopted to realize the micro nanochannel alignment between the cover plate and the substrate. The device observes the alignment condition of the glass micro nanofluidic chip by the inverted high-power microscope and drives a vacuum sucker absorbing the cover plate to move by a three-dimensional micro motion table, thereby realizing the three-dimensional micro motion of the cover plate. The device consists of the three-dimensional micro motion table, the vacuum absorption device, the inverted microscope and a micro hot plate. The method and the device can reduce the manufacturing period of the chip, reduce the manuf