Trap apparatus, exhaust system, and treating system using the same

Provided is a trap apparatus, which is disposed in an exhaust passage (22) for discharging an exhaust gas from a treating chamber (10) for treating a work (W), thereby to trap the exhaust from the exhaust gas, so that the exhaust trapped by a trap element can be efficiently eliminated to reproduce the trap element. The trap apparatus comprises a casing (42) disposed in the exhaust passage, a trapelement (48) disposed in the casing for trapping the exhaust, a trap heating device (54) for heating the trap element, a coolant introducing device (60) for introducing a coolant into the casing, a coolant discharging unit (62) for discharging the coolant from the casing, and a control unit (88) for making a control to introduce the coolant from the coolant introducing device into the casing, while the trap element being heated by the trap heating device, so as to eliminate the exhaust trapped by the trap element.