Non-volatile memory cell and manufacturing method thereof

The invention provides a non-volatile memory cell and a manufacturing method thereof. The method comprises the following steps: providing a semiconductor substrate which is provided with a conductive layer and a spacer layer in order; defining at least one trench between the spacer layer and the con...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XIAO QINGNAN, HUANG ZHONGLIN, HUANG XINBIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a non-volatile memory cell and a manufacturing method thereof. The method comprises the following steps: providing a semiconductor substrate which is provided with a conductive layer and a spacer layer in order; defining at least one trench between the spacer layer and the conductive layer; forming a first oxidization layer at the bottom of the trench; forming a dielectric layer on the side wall of the trench, above the first oxidization layer and above the spacer layer; forming a first polysilicon layer in the trench; and removing the dielectric layer above the spacer layer to form the basic structure of the non-volatile memory cell of the invention.