Method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances
The invention discloses a method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances, comprising the following steps: adopting carbon cloths and short carbon fiber mesh tires to be hoop wound alternately to form plane fibers and introducing reinforcing fibers in the ver...
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Format: | Patent |
Sprache: | chi ; eng |
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