Method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances

The invention discloses a method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances, comprising the following steps: adopting carbon cloths and short carbon fiber mesh tires to be hoop wound alternately to form plane fibers and introducing reinforcing fibers in the ver...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI YONGJUN, HOU WEIQUAN, XUE NINGJUAN, XIAO ZHICHAO, SU JUNMING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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