Method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances

The invention discloses a method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances, comprising the following steps: adopting carbon cloths and short carbon fiber mesh tires to be hoop wound alternately to form plane fibers and introducing reinforcing fibers in the ver...

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Hauptverfasser: LI YONGJUN, HOU WEIQUAN, XUE NINGJUAN, XIAO ZHICHAO, SU JUNMING
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a method for preparing carbon/carbon heat shields used for polysilicon hydriding furnances, comprising the following steps: adopting carbon cloths and short carbon fiber mesh tires to be hoop wound alternately to form plane fibers and introducing reinforcing fibers in the vertical direction to prepare three-dimensional heat shield preforms, carrying out the followings on the three-dimensional heat shield preforms in sequence: chemical vapor infiltration and densification processes, resin or pitch impregnation and carbonization treatment, high-temperature purification treatment and mechanical processing, and carrying out chemical vapor deposition coating treatment on the surfaces of the carbon/carbon heat shields undergoing mechanical processing, thus obtaining the high-purity carbon/carbon heat shields. The method is simple in processes, short in cycle and low in cost, can improve the product purity under the premise of not reducing the heat insulation of the carbon/carbon heat shields