Method for removing boron-containing impurities from halogen silanes and apparatus for performing said method

The invention relates to a method for reducing the content of boron-containing compounds in compositions I comprising at least one silicon halide, especially of chlorosilanes of the type HnSiCI4-n with n being equal to 0, 1, 2 or 3, by introducing a small amount of moisture into the composition I in...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SELIGER BEATE, SCHLADERBECK NORBERT, PAULI INGO, RAULEDER HARTWIG, DIEFENBACH JOACHIM, MECKLENBURG ANDRE, SCHORK REINHOLD, KROPFGANS FRANK
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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