Method for removing boron-containing impurities from halogen silanes and apparatus for performing said method

Method for removing boron-containing impurities from halogen silanes and apparatus for performing said method

The invention relates to a method for reducing the content of boron-containing compounds in compositions I comprising at least one silicon halide, especially of chlorosilanes of the type HnSiCI4-n with n being equal to 0, 1, 2 or 3, by introducing a small amount of moisture into the composition I in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SELIGER BEATE, SCHLADERBECK NORBERT, PAULI INGO, RAULEDER HARTWIG, DIEFENBACH JOACHIM, MECKLENBURG ANDRE, SCHORK REINHOLD, KROPFGANS FRANK
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:The invention relates to a method for reducing the content of boron-containing compounds in compositions I comprising at least one silicon halide, especially of chlorosilanes of the type HnSiCI4-n with n being equal to 0, 1, 2 or 3, by introducing a small amount of moisture into the composition I in a first step and separating the hydrolyzed boron- and/or silicon-containing compounds in a second step in such a way that a pre-purified composition II having a reduced boron content is obtained, wherein, in particular, the first and second steps can be run in at least one or more cycles. Also claimed is an apparatus for performing the method and an overall system into which this apparatus is integrated.