Micro air bubbles generating device, method for generating micro air bubbles and baseplate processing device

A micro air bubbles generating device (10) for generating liquid (23) containing micro air bubbles includes a micro air bubbles generating part(12)for generating liquid (23)containing the micro air bubbles, impurities removing mechanism part (30) for removing impurities from the liquid which is prov...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NISHIBE SACHINOBU, KIKUCHI MASARU, ANDO YOSHIDAI, HIROSE HARUMICHI, ANBE MASAYASU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A micro air bubbles generating device (10) for generating liquid (23) containing micro air bubbles includes a micro air bubbles generating part(12)for generating liquid (23)containing the micro air bubbles, impurities removing mechanism part (30) for removing impurities from the liquid which is provided by the micro air bubbles generating part (12) and contains the micro air bubbles.