Micro electro mechanical system

Micro electro mechanical system

The present specification discloses an exemplary system and method for forming a micro-electro mechanical system (MEMS) transducer. According to one exemplary embodiment disclosed herein, the MEMS transducer is formed from two wafers and decouples the thickness of the proof mass and flexures, thereb...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: RAMAMOORTHI SRIRAM
Format: Patent
Sprache:chi ; eng
Schlagworte:
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Beschreibung
Zusammenfassung:The present specification discloses an exemplary system and method for forming a micro-electro mechanical system (MEMS) transducer. According to one exemplary embodiment disclosed herein, the MEMS transducer is formed from two wafers and decouples the thickness of the proof mass and flexures, thereby allowing each to be independently designed. Additionally, the present exemplary system and methodetches both sides of the wafer defining the flexures and the proof mass, allowing for optical alignment of the top and bottom wafers.