Optical system manufacturing method

A projection optical system (PS) manufacturing method evaluates an optical performance of an entire system from approximate planes of all the optical planes in the projection optical system (PS) and changes at least one of the approximate planes of all the optical planes (such as a reduction side le...

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Bibliographische Detailangaben
Hauptverfasser:	IMAOKA MASAYUKI, HAYASHI KOHTARO, MATSUMOTO YASUHIRO, MASUBUCHI TOMOKAZU, ISHIHARA JUN, TAKITANI TOSHIYA, OKUMURA YOSHIHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCESIN A PLASTIC STATE SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	A projection optical system (PS) manufacturing method evaluates an optical performance of an entire system from approximate planes of all the optical planes in the projection optical system (PS) and changes at least one of the approximate planes of all the optical planes (such as a reduction side lens plane (S(L2s)) of a second lens L2 of an initial article referred to as 'a change approximate plane') so as to obtain a change amount of tbe change approximate plane when optimal optical performance is obtained as the entire system. According to the change amount, a correction treatment amount for the cavity plane of a metal mold corresponding to the change approximate plane is obtained to perform correction treatment, thereby manufacturing a new cavity plane.