Slurry supply system

A slurry supply system with multiple supply modules and a flushing module concurrently coupled to the multiple supply modules is provided. Each supply module includes a slurry reservoir and at least one delivery line connecting to the slurry reservoir, wherein each delivery line is oriented toward a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TAN PAUL, YANG CHIHIANG, HSU MING-TZUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACTUATING-FLOATS BLASTING CLEANING CLEANING IN GENERAL COCKS DEVICES FOR VENTING OR AERATING ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PIPE-LINE SYSTEMS PIPE-LINES PREVENTION OF FOULING IN GENERAL STORING OF DISTRIBUTING GASES OR LIQUIDS TAPS THERMAL INSULATION IN GENERAL TRANSPORTING VALVES WEAPONS
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Beschreibung
Zusammenfassung:	A slurry supply system with multiple supply modules and a flushing module concurrently coupled to the multiple supply modules is provided. Each supply module includes a slurry reservoir and at least one delivery line connecting to the slurry reservoir, wherein each delivery line is oriented toward a chemical mechanical polishing apparatus. The flushing module includes a flushing liquid reservoir and multiple flushing lines connecting to the flushing liquid reservoir, wherein each flushing line is coupled to each delivery line thereby the flush module can selectively flush one of the delivery lines.