Method for producing rotors or stators of a turbomolecular pump

The invention relates to a method for producing the rotors or stators of a turbomolecular pump having rotor blades that are produced from a special aluminum alloy.

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Bibliographische Detailangaben
Hauptverfasser: ETSCHENBERG LARS, ROTH ISHAN, HOELZER RAINER, FROITZHEIM MICHAEL
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention relates to a method for producing the rotors or stators of a turbomolecular pump having rotor blades that are produced from a special aluminum alloy.