Electroacoustic sensing apparatus

An electro-acoustic sensing device includes a sensing chip, a substrate chip and a sealing component. The sensing chip is used for performing electro-acoustic transducing, to output an electrical signal; and the sensing chip at least has one first contact. The substrate chip is arranged below the se...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YAN KAIXIANG, CHEN ZHENYI, SONG BAIXUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An electro-acoustic sensing device includes a sensing chip, a substrate chip and a sealing component. The sensing chip is used for performing electro-acoustic transducing, to output an electrical signal; and the sensing chip at least has one first contact. The substrate chip is arranged below the sensing chip, and has at least one second contact, at least one electrical channel and at least one channel contact. The second electrical contact is in electric contact with the first contact, the second contact and the channel contact is located at different surfaces of the substrate chip, the electrical channel penetrates through the substrate chip, for electrically connecting the second electrical contact with the channel contact. The electrical signal is transmitted to the channel contact through the first contact, the second contact, and the electrical channel. The sealing component is located between the sensing chip and the substrate chip for air-tight coupling of the sensing chip andthe substrate chip.