Method for cooling polycrystalline silicon hydrogen reducing furnace outlet duct by air
The invention discloses a method for cooling the air outlet pipe of a polysilicon hydrogen reduction furnace by air, which is characterized in that the outside of the air outlet pipe of the polysilicon hydrogen reduction furnace has the air with much lower temperature than that of the air outlet pip...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a method for cooling the air outlet pipe of a polysilicon hydrogen reduction furnace by air, which is characterized in that the outside of the air outlet pipe of the polysilicon hydrogen reduction furnace has the air with much lower temperature than that of the air outlet pipe, the air takes the heat of the air outlet pipe away to reduce the temperature of the air outlet pipe through heat exchange with the air outlet pipe by air flow; the air temperature is normal temperature and the pressure is 0.5-0.8MPa; and the temperature range of the air outlet pipe of the polysilicon hydrogen reduction furnace is 380-420 DEG C after air cooling. The method has the advantages of reaching favorable cooling effect, ensuring the stable, normal, safe and efficient operation of the polysilicon hydrogen reduction furnace and leading to automatic and stable air flow control. |
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