Lithographic apparatus having parts with a coated film adhered thereto

The present invention discloses a lithographic apparatus having a coating film adhering thereon. The lithographic apparatus comprises a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure exten...

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Bibliographische Detailangaben
Hauptverfasser:	LOOPSTRA ERIK ROELOF, STEFFENS KOEN, DIRECKS DANIEL JOZEF MARIA, SIMONS WILHELMUS FRANCISCUS JO, FIEN MENNO, VANDERHAM RONALD, LIEBREGTS PAULUS MARTINUS MARI, JANSSEN FRANCISCUS JOHANNES JO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	The present invention discloses a lithographic apparatus having a coating film adhering thereon. The lithographic apparatus comprises a removable adhesive film carrying a coating on at least a part of the apparatus. In an embodiment, a liquid supply system having a liquid confinement structure extending along at least part of a boundary of a space between a projection system and a substrate support is disclosed, wherein the film carrying the coating is on at least part of the liquid confinement structure.