Substrate treating device

This invention provides a substrate processing device which cannot cause the large and complication of the device and is able to enable the providing position and the position of taking out of the substrate to be the same. The substrate processing device includes: a roller conveyor (8) that conveys...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NISHIBE SACHINOBU, NAKATSUKA YASUYUKI, FUSE YOICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	This invention provides a substrate processing device which cannot cause the large and complication of the device and is able to enable the providing position and the position of taking out of the substrate to be the same. The substrate processing device includes: a roller conveyor (8) that conveys the substrate back and forth in straight line corresponding to the horizontal direction; a loader section (2) that is configured to one end side of the roller conveyor and provides an unsettled substrate; a washing treating part (11) which carries out washing processing of the unsettled substrate which was supplied from this loader section and conveyed by the roller conveyor; a humidifying knife (21) for utilizing the treating solution to humidify the substrate before providing the unsettled substrate to the washing treating part; a drying knife (22) for injecting gas to dry the substrate when taking out the unsettled substrate treated by the washing treating part by the roller conveyor; and an unloader part (3) th