Test unit for improving semiconductor yield

A test cell (100) for localizing defects includes a first active region (110), a second active region (120) formed substantially parallel to the first active region, a third active region (130) formed substantially parallel to the first and second active regions, a fourth active region (115) formed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TONELLO STEFANO, ZWALD MARK, STINE BRIAN, KITCH VICTOR
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INFORMATION STORAGE PHYSICS SEMICONDUCTOR DEVICES STATIC STORES
Online-Zugang:	Volltext bestellen
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