Test unit for improving semiconductor yield

Test unit for improving semiconductor yield

A test cell (100) for localizing defects includes a first active region (110), a second active region (120) formed substantially parallel to the first active region, a third active region (130) formed substantially parallel to the first and second active regions, a fourth active region (115) formed...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TONELLO STEFANO, ZWALD MARK, STINE BRIAN, KITCH VICTOR
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INFORMATION STORAGE
PHYSICS
SEMICONDUCTOR DEVICES
STATIC STORES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A test cell (100) for localizing defects includes a first active region (110), a second active region (120) formed substantially parallel to the first active region, a third active region (130) formed substantially parallel to the first and second active regions, a fourth active region (115) formed between the first and second active regions, and a fifth active region (125) formed between the second and third active regions. The fourth and fifth active regions are formed adjacent to opposite end portions of the second active region. The fourth and fifth active regions are also formed substantially perpendicular to the second active region.