Full-automatic wafer test platform device
The invention relates to a full automatic wafer test platform device detecting the function and performance index of a semiconductor wafer, wherein, an underframe is provided with a horizontal linearguide way provided with a bottom plate, which is connected with the horizontal linear guide way in a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a full automatic wafer test platform device detecting the function and performance index of a semiconductor wafer, wherein, an underframe is provided with a horizontal linearguide way provided with a bottom plate, which is connected with the horizontal linear guide way in a sliding way; the underframe is provided with a sliding drive device of the bottom plate; the bottomplate is provided with a vertical linear guide way perpendicular to the horizontal linear guide way; the vertical linear guide way is glidingly connected with a support plate and a sliding drive device thereof; the support plate is provided with a wafer absorption and unloading device; a probe frame is articulated with the upper side of the wafer absorption and unloading device; a mounting grooveof an optical positioning and recognition device is arranged on a stander at one side of the wafer absorption and unloading device. The full automatic wafer test platform device has the advantages ofhigh automation, compact de |
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