Hollow type cathode discharging device
A hollow cathodic discharge device comprises a hollow anode electrode, a hollow cathode electrode insulated fixed in the hollow anode electrode and a gas distributing pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are respectively provided wit...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A hollow cathodic discharge device comprises a hollow anode electrode, a hollow cathode electrode insulated fixed in the hollow anode electrode and a gas distributing pipe fixed in the hollow cathode electrode. The hollow anode electrode and the hollow cathode electrode are respectively provided with anode openings and the corresponding cathode openings, and a spiral channel winding through every cathode opening along the axial direction is formed between the gas distributing pipe and the hollow cathode electrode, and thereby a plurality of continuous and interconnected reaction chambers are formed through the spiral channel; further a gas flow delivering hole is arranged for introducing the reacting gas into every reaction chamber. The reacting gas can be uniformly distributed through the interconnected reaction chambers, which is beneficial for the scale up application in length of the device axis, thus overcoming the shortcoming of the prior art. |
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