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A bumped semiconductor device contact structure is disclosed including at least one non-planar contact pad having a plurality of projections extending therefrom for contacting at least one solder ballof a bumped integrated circuit (IC) device, such as a bumped die and a bumped packaged IC device. Th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DELL AMICO RODRIGUEZ JOSE MIGU, FERNANDEZ MARTIN FELIX, PEREZ CABRERA YUNIESKY
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A bumped semiconductor device contact structure is disclosed including at least one non-planar contact pad having a plurality of projections extending therefrom for contacting at least one solder ballof a bumped integrated circuit (IC) device, such as a bumped die and a bumped packaged IC device. The projections are arranged to make electrical contact with the solder balls of a bumped IC device without substantially deforming the solder ball. Accordingly, reflow of solder balls to reform the solder balls is not necessary with the contact pad of the present invention. Such a contact pad may beprovided on various testing equipment such as probes and the like and may be used for both temporary and permanent connections. Also disclosed is an improved method of forming the contact pads by etching and deposition.