Ion beam milling of a work piece and determining and controlling extent thereof

Ion beam milling of a work piece and determining and controlling extent thereof

Method, device, and system, for directed multi-deflected ion beam milling of a work piece, and, determining and controlling extent thereof. Providing an ion beam (10); and directing and at least twice deflecting the provided ion beam, for forming a directed multi deflected ion beam, wherein the dire...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: BOGUSLAVSKY DIMITRI,CHEREPIN VALENTIN,SMITH COLIN
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:Method, device, and system, for directed multi-deflected ion beam milling of a work piece, and, determining and controlling extent thereof. Providing an ion beam (10); and directing and at least twice deflecting the provided ion beam, for forming a directed multi deflected ion beam, wherein the directed multi-deflected ion beam is directed towards, incident and impinges upon, and mills, a surface of the work piece. Device includes an ion beam source assembly (110); and an ion beam directing and multi-deflecting assembly (120), for directing and at least twice deflecting the provided ion beam, for forming a directed multi-deflected ion beam, wherein the directed multi-deflected ion beam is directed towards, incident and impinges upon, and mills, a surface of the work piece.