Substrate check device and substrate check method
An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. A substrate inspecting method includes the steps of: applying inspect...
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| creator | SUN YOUNG-I,KIM YEUNG-II,YANG CHONG-UK,KIM CHAN-JAE |
| description | An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. A substrate inspecting method includes the steps of: applying inspecting light on a substrate(140) where a pattern(142) is formed; detecting the brightness of the inspecting light reflected from the substrate; and determining whether the pattern is faulty from the detected brightness. The inspecting light is applied to the substrate in a coherent state. |
| format | Patent |
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A substrate inspecting method includes the steps of: applying inspecting light on a substrate(140) where a pattern(142) is formed; detecting the brightness of the inspecting light reflected from the substrate; and determining whether the pattern is faulty from the detected brightness. The inspecting light is applied to the substrate in a coherent state.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FREQUENCY-CHANGING ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING ELECTRIC VARIABLES ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; MEASURING MAGNETIC VARIABLES ; NON-LINEAR OPTICS ; OPTICAL ANALOGUE/DIGITAL CONVERTERS ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICAL LOGIC ELEMENTS ; OPTICS ; PHYSICS ; SEMICONDUCTOR DEVICES ; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF ; TESTING</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20071010&DB=EPODOC&CC=CN&NR=101051619A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20071010&DB=EPODOC&CC=CN&NR=101051619A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUN YOUNG-I,KIM YEUNG-II,YANG CHONG-UK,KIM CHAN-JAE</creatorcontrib><title>Substrate check device and substrate check method</title><description>An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. 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| subjects | BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING |
| title | Substrate check device and substrate check method |
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