Substrate check device and substrate check method

An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. A substrate inspecting method includes the steps of: applying inspect...

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Bibliographische Detailangaben
1. Verfasser: SUN YOUNG-I,KIM YEUNG-II,YANG CHONG-UK,KIM CHAN-JAE
Format: Patent
Sprache:eng
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Zusammenfassung:An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. A substrate inspecting method includes the steps of: applying inspecting light on a substrate(140) where a pattern(142) is formed; detecting the brightness of the inspecting light reflected from the substrate; and determining whether the pattern is faulty from the detected brightness. The inspecting light is applied to the substrate in a coherent state.