Substrate check device and substrate check method
An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. A substrate inspecting method includes the steps of: applying inspect...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | An inspecting apparatus and a substrate inspecting method using the same are provided to check a fault of a pattern by applying an inspection light to a substrate in a coherent state and sensing brightness of the inspection light. A substrate inspecting method includes the steps of: applying inspecting light on a substrate(140) where a pattern(142) is formed; detecting the brightness of the inspecting light reflected from the substrate; and determining whether the pattern is faulty from the detected brightness. The inspecting light is applied to the substrate in a coherent state. |
---|