Method for local bonding silicon / glass by laser

This invention discloses a method for laser local bonding of silicon/glass. The method comprises: washing, performing a first activation, performing a second activation, pre-bonding, and laser heating. After surface activation treatment, glass and silicon wafer can be intimately bonded by laser loca...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TIELIN,LIAO SHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SEMICONDUCTOR DEVICES SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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