Device for etching a conductive layer and etching method

The invention concerns a device for chemically etching an electrically conductive layer (2) on a transparent substrate (1), comprising means for supporting (4) the substrate (1) and means for spraying (5) a solution. The invention is characterized in that the spraying means (5) consist of a pluralit...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MAZZARA CHRISTOPHE,GIRARD JAONA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROMOBJECTS SEMICONDUCTOR DEVICES
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