Anticorrdant stripping waste liquor regeneration method and device

The invention provides a recycling method and a recycling device of a resist stripper scrapped liquid, especially suitable for economical recycling a resist stripper scrapped liquid which is generated when in a stripping process using a stripper scrapped liquid containing various special amine compounds and when using various resists and stripper scrapped liquid. The recycling device is suitable for being used in the recycling method. The resist stripper scrapped liquid recycling method of the invention is a method for recycling a resist stripper scrapped liquid containing water, resists, amine compounds and an organic solvent, the method is characterized by containing: (a) an acid adding process in which an acid is reacted with the amine compounds of the resist stripper scrapped liquid so that the amine compounds is formed as amine-acid coumpounds which would not be distilled when distilling the organic solvent; and (b) a process for distilling the reaction products obtained in the process (a) to obtain the