Anticorrdant stripping waste liquor regeneration method and device

The invention provides a recycling method of a resist stripper scrapped liquid, especially suitable for economical recycling a resist stripper scrapped liquid which is generated when in a stripping process using a stripper scrapped liquid containing various special amine compounds and when using various resists and stripper scrapped liquid, and a recycling device thereof. The recycling device is suitable for being used in the recycling method. The recycling method of the invention is a method for recycling a resist stripper scrapped liquid containing water, resists, amine compounds and an organic solvent, the method is characterized by containing: (a) an acid adding process in which an acid is reacted with the amine compounds of the resist stripper scrapped liquid so that the amine compounds is precipitated as amine-acid manner from the stripper scrapped liquid; (b) a process for filtering the amine-acid compounds precipitated in the process (a) from the stripper scrapped liquid; and (c) a process for distill