Systems and methods for nanowire growth and harvesting

The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention...

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Bibliographische Detailangaben
1. Verfasser: PAN YAOLING,DUAN XIANGFENG,DUBROW BOB,GOLDMAN JAY,MOSTARSHED SHAHRIAR,NIU CHUNMING,ROMANO LINDA T.,STUMBO DAVE
Format: Patent
Sprache:eng
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Zusammenfassung:The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.