Variable-shape mirror and optical pickup apparatus therewith

A variable-shape mirror has a substrate, a lower electrode film formed on the substrate, a piezoelectric film formed on the lower electrode film, an upper electrode film formed on the piezoelectric film, and a mirror film formed directly on the substrate and arranged to be surrounded by a driver por...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	CHOJI HIDEKI,MAEDA SHIGEO,KODERA HIDETOSHI,JINNO ISAKU
Format:	Patent
Sprache:	eng
Schlagworte:	INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
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Beschreibung
Zusammenfassung:	A variable-shape mirror has a substrate, a lower electrode film formed on the substrate, a piezoelectric film formed on the lower electrode film, an upper electrode film formed on the piezoelectric film, and a mirror film formed directly on the substrate and arranged to be surrounded by a driver portion constituted by the lower electrode film, the piezoelectric film, and the upper electrode film. The mirror film is arranged on a movable portion provided in the substrate, and at least part of the driver portion is arranged on the movable portion.