Air bearing surface processing method of thin-film magnetic head slider

A method of processing an air bearing surface of a thin-film magnetic head slider is provided. A first silicon film, a first carbon film, a second silicon film, and a second carbon film are laminated in that order on a face of a thin-film magnetic head slider facing a medium. A protrusion resist pattern that forms protrusions is formed on the second carbon film. Portions of the second carbon film and the second silicon film that are not covered with the protrusion resist pattern are removed by reactive ion etching with O2/CF4. A third carbon film is formed on the first carbon film exposed by the removal of the portions. The protrusion resist pattern is removed to expose the protrusions including the second silicon film and the second carbon film. An ABS resist pattern is formed on exposed surfaces of the protrusions and the third carbon film. A surface not covered with the ABS resist pattern is processed to impart an ABS uneven pattern.